ECEN 6988

Nano- and Micro-Electro Mechanical Systems 3 s.h

Youngstown State University · UGRD · Fall 2026

1 section

Catalog description

NEMS and MEMS fabrications, elastic system structure, membranes and plates, magnetically actuated systems, continuum theory and scaling laws. Microfluidics and nanofluidics devices. Prereq.: Graduate standing.

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Class #youngstown-2404Fall 2026UGRD

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