Microfabrication Sciences

Catalog description

This is a lecture/laboratory course in the Physics Department that is intended to give students a hands-on opportunity to learn techniques commonly used in micro- and nano-fabrication cleanrooms worldwide. We will cover processing steps in detail, including oxidation, dopant diffusion, ion implantation, lithography, thin film deposition, and etching. We will emphasize how these steps combine to build modern devices. We will also give examples of how software packages are used to simulate and model the physics and chemistry of fabrication.