Nano-Fabrication of Integrated Solid State Devices

Catalog description

This course covers the history, design, and fabrication of CMOS and micro-electro-mechanical systems (MEMS). Typical fabrication methods cover CMOS, front-end-of-line (FEOL), back-end-of-line (BEOL), surface and bulk micromachining. Typical VLSI devices and selected RF MEMS are covered.