Design, Fabrication, and Simulation of MEMS

Catalog description

This course is an introduction to Microelectromechanical Systems (MEMS) technology. It covers basic microfabrication technologies, the governing physics for MEMS devices in different energy domains (mechanical, electrical, optical, thermal, and fluidic), and the analysis of micromachined miniature sensors and actuators. Fabrication and design of MEMS devices be illustrated using examples of existing research prototypes and commercial products. Students will also learn how to design, lay out, and fabricate MEMS using CAD based design and visualization software. Components: Laboratory, Class Prereqs/Coreqs: P: "C-" or better in GENENG 2340 or PHYSICS 1450 or PHYSICS 2340 Typically Offered: Spring