BEE 551

Introduction to MEMS

University of Washington-Bothell Campus · UGRD · Fall 2026

1 section

Catalog description

Develops the basics for microelectromechanical devices and systems including micro-actuators, micro-sensors, and micro-motors, principles of operation, different micromachining techniques (surface and bulk micromachining), IC-derived microfabrication techniques, thin-film technologies as they apply to MEMS.

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Class #washington_bothell_campus-1134Fall 2026UGRD5 credits

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Instructor: Staff

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