Fundamentals of Integrated Circuit Technology

Catalog description

Introduces the fundamentals of IC technologies. Covers the microelectronic processing technology, including evaporation, sputtering, epitaxial growth, diffusion, ion implantation, oxidation, chemical vapor deposition, and photoresists. Introduces the design considerations for transistors, materials and process characterization, and future trends. Prerequisite: a minimum grade of 1.7 in either B EE 331 or E E 331.