BEE 451
Introduction to MEMS
University of Washington-Bothell Campus · UGRD · Fall 2026
1 section
Catalog description
Develops the basics for microelectromechanical devices (MEMS) including micro-actuators, micro-sensors, and micro-motors, principles of operation, different micromachining techniques (surface and bulk micromachining), IC-derived microfabrication techniques, thin-film technologies as they apply to MEMS. Prerequisite: a minimum grade of 1.7 in either B EE 331 or E E 331; recommended: Fundamental circuit and electronic classes for EE major and design classes for CompE major
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Availability not recently verifiedClass #washington_bothell_campus-1091Fall 2026UGRD5 credits
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