Clean Room Lab Practicum.

Catalog description

Semester course; 3 laboratory hours. 1 credit. Prerequisite: EGRE 334 or permission of instructor. The course develops the detailed knowledge and skills required to design and fabricate advanced microscale and nanoscale devices for doctoral thesis work in a micro- and nano-fabrication facility cleanrooms. The course focuses on fabricating a nanostructured device and involves photolithography, wet and dry etching, oxidations, diffusions and thin film depositions. Students will complete the processing of the device and perform characterization experiments. Design skills will also be developed, including design and layout using software tools and fabrication of custom photomasks. Students will document all aspects of the laboratory work.