MEMS Design and Fabrication.

Catalog description

Semester course; 3 lecture hours. 3 credits. Prerequisites: EGRE 303 and EGRE 334 or permission of instructor. The course provides the background required to conduct research in microelectromechanical systems. The course provides an overview as well as detailed coverage of material properties, specialized fabrication techniques and the fundamental principles of the major classes of MEMS devices. This will include mechanical sensors and actuators, surface acoustic wave devices, optical sensors, modulators and switches, bioMEMS, chemical and biochemical sensors, and microfluidic devices.