Microscale and Nanoscale Fabrication.

Catalog description

Semester course; 3 lecture and 3 laboratory hours. 4 credits. Prerequisites: EGRE 306 and EGRE 334 , both with a minimum grade of C. This course presents the design tools and techniques for designing a fabrication process as well as a device design and layout for advanced microscale and nanoscale devices. A number of different types of device technologies are covered, incorporating electronic, micromechanical and microfluidic devices and sensors. In the laboratory section of the course, students work in design teams to develop a complete fabrication process and design layout for a microscale device to meet appropriate engineering standards and multiple realistic constraints. Computer simulations and computer-aided design tools are used in the final design. The laboratory section of this course accomplishes the design phase of the senior design capstone project, which is presented at the end of semester and fabricated in the subsequent course, EGRE 436 .