Introduction to Microfabrication.

Catalog description

Semester course; 3 lecture and 3 laboratory hours. 4 credits. Prerequisites: CHEM 101 , EGRE 201 and MATH 201 , each with a minimum grade of C or CHEM 101 , EGRE 206 , MATH 201 and PHYS 208 , each with a minimum grade of C. The course gives an overview of microscale device fabrication and testing for a general audience. A wide variety of new terms, equipment and processes are presented. Fundamentals of photolithography, mask making, diffusion, oxidation, ion implantation, film deposition and etching are covered.