CPEG 420

Nanotechnology Fabrication Pri.

Virginia State University · UGRD · Fall 2026

1 section
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Introduction to semiconductor fabrication principles and technology, including crystal growth, oxidation, diffusion, ion implantation, photolithography, chemical vapor deposition, physical vapor deposition, plasma reactive ion etching, chemical mechanical polishing and other nanotechnology manufacturing techniques.

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Class #virginia-0453Fall 2026UGRD3 credits
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