CPEG 420
Nanotechnology Fabrication Pri.
Virginia State University · UGRD · Fall 2026
1 section
Catalog description
Introduction to semiconductor fabrication principles and technology, including crystal growth, oxidation, diffusion, ion implantation, photolithography, chemical vapor deposition, physical vapor deposition, plasma reactive ion etching, chemical mechanical polishing and other nanotechnology manufacturing techniques.
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001
Availability not recently verifiedClass #virginia-0453Fall 2026UGRD3 credits
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