Principles of Microfabrication. (2-3) 3 Credit Hours

Catalog description

Prerequisite: Graduate standing or completion of EE 3323 . Fundamentals of microfabrication techniques, including photolithography, thin film deposition (physical vapor deposition and chemical vapor deposition), etching, thermal oxidation, diffusion, ion implantation, chemical and mechanical polishing, and epitaxy. Nanofabrication techniques that enable sub-micron feature sizes will also be discussed (electron beam or x-ray lithography, focused ion beam, and other bottom-up approaches). Students will visit nearby research institutes and foundry companies as part of this course. (Credit cannot be earned for both EE 4533 and EE 5413 . Same as ME 5803. Credit cannot be earned for both EE 5413 and ME 5803.) Generally offered: Fall. This course has Differential Tuition.