EE 6345

ADVANCED MEMS -- MICROELECTROMECHANICAL SYSTEMS.

University of Texas at Arlington · UGRD · Fall 2026

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Microelectromechanical systems (MEMS) and devices including micro-actuators and optical MEMS. Application strategy of MEMS; fabrication and design; actuation mechanism and architectures; optical sensor and communication applications. Mask layout and hands-on design, fabrication procedures, design rules, demonstrated examples, and integration architectures. Prerequisite: EE 5344 .

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Class #texas_arlington_new-2607Fall 2026UGRD3 credits
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