Micro/Nano Manufacturing

Catalog description

Credits 3. 2 Lecture Hours. 3 Lab Hours. Product miniaturization and impact; review of atomic structure, electrical and physical properties of materials; ultraprecision machining; microlithography; dry and wet etching/sputtering techniques; isotropic and anisotropic processes; pattern transfer with additive processes; surface micromachining; microreplication processes; introduction to packaging technology and nanometrology; manufacturing of selected microsystems (MEMS) and their applications. Prerequisites: Grade of C or better in CHEM 107 , PHYS 207 , and ENGR 217/PHYS 217 or PHYS 217/ENGR 217 ; junior or senior classification in manufacturing and mechanical engineering technology.