Introduction to Microelectromechanical Devices and Systems

Catalog description

Credits 4. 3 Lecture Hours. 2 Lab Hours. Provides a broad overview of the past and current developments in the emerging area of MEMS (microelectromechanical systems); discusses the fundamental working principles, designs and fabrication techniques; consists of several special topics, discussing the latest important applications in different fields. Prerequisite: Graduate classification in engineering.