IC MEMS and Sensor Fabrication

Catalog description

Credits 4. 3 Lecture Hours. 3 Lab Hours. Fundamental unit processes for the fabrication of silicon IC's and extension of these processes to the specialized micro-machining operations used for MEMS and sensor fabrication; basic process operations used in the laboratory to build simple IC structures; devices then characterized. Prerequisite: ECEN 325 , ECEN 370 , or approval of instructor.