Microelectronics Process Engineering

Catalog description

Credits 3. 3 Lecture Hours. State-of-the-art process engineering principles on microelectronics, especially for the fabrication of very large scale integrated circuits (VLSICs); fundamental unit processes, such as thin film deposition, thermal growth, lithography, etching and doping, material structures and properties, and basic device operation principles. Prerequisites: CHEN 354 and CHEN 364 or approval of instructor; CHEM 322 .