Nano/Microtechnologies for (bio)MEMS

Catalog description

Introduces advanced technologies that enable integration of micro-sensors and micromechanical components on the same chip to produce miniature devices called micro electromechanical systems (MEMS). The course covers physical principles and design rules that govern the performance of a device at small length scales. Discuss a large set of microfabrication techniques including photolithography, material removal processes, and additive technologies. Discuss the applications of MEMS devices in automotive, communication, energy, and BioMEMS in biomedical applications.