GEN 7465

An Introduction to Quantitative X-ray Microanalysis

Stanford University · UGRD · Fall 2026

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This course will introduce students to the theories and techniques involved in measuring and quantifying the chemical composition of solid materials using X-ray spectroscopy. The course will be largely focused on electron beam instruments including scanning and transmission electron microscopes (SEM-EDS and TEM-EDS) and Electron Probe Microanalyzer (EPMA-EDS; EPMA-WDS), with the laboratory component consisting of a combination of instrument training and data collection on multiple electron beam instruments, coupled with in-lab exercises covering the methods associated with the evaluation, processing, and presentation of X-ray data. Students will also learn to utilize multiple cutting-edge data quantitative spectroscopy software packages. The goal of this course is to provide graduate students with the tools required to make informed decisions when designing projects that involve understanding the composition(s) of solid materials at the nano- and micro-scales. Introduce students to the theory and technique behind determining the chemical composition of solid materials using X-ray spectroscopy. Labs will be offered in two sections with 7 students in each.

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Class #stanford-7465Fall 2026UGRD3 credits
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