EE 507

Micro- and Nano-Fabrication Technology

University of Southern California · UGRD · Fall 2026

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Catalog description

Physical basis of technologies for the fabrication of micro- and nano-scale devices. Thin-film deposition, etching, and material modification processes; pattern transfer methods.

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Current meeting, instructor, credit, and enrollment details

Updated 9 hours ago

C

3 openSeats: 33/36 seats Last recorded: Aug 8, 2026, 10:16 PM
Class #30773Fall 2026UGRD4.0 credits
3 available33 enrolled36 capacity
Days & times
MW 14:00-15:50
Meeting dates
Location
Instructor
Wei Wu
Details checked 9 hours agoSeats checked 9 hours ago
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