Materials Modification in Nanofabrication - NMT 315

Catalog description

This course covers in detail the processing steps used in modifying material properties in nanofabrication. Included are chemical reaction, growth and annealing processes. The impact of thermal processing and thermal processing on defects, gettering, and impurities and overall electrical, mechanical, optical, and chemical properties are studied. The student grows and measures gate and field oxides, implants and activates source and drain regions, and evaluates thermal budget requirements using state-of-the-art tools. Included also are other modification technologies such as ion implantation, diffusion and chemical surface preparation and treatment. Substrate preparation processing such as slicing, etching, polishing and epitaxial growth are also covered. Students with a semester level of Freshman 1, Freshman 2 or Sophomore 1 may not enroll.