Materials Safety and Equipment Overview for Nanofabrication - NMT 311

Catalog description

This course provides an overview of basic nanofabrication processing equipment and materials handling procedures with a focus on safety, environment, and health issues. Topics covered include: cleanroom operation, environmental, safety, and health issues, vacuum pump systems operation, environmental safety and health issues (covering direct drive mechanical, roots blowers, turbomolecular, and dry mechanical systems); thermal- processing equipment operation, safety, environmental, and health issues (covering horizontal, vertical, rapid thermal annealing tools); chemical vapor deposition system operation, safety, environmental, and health issues (covering gas delivery, corrosive and flammable gas storage and plumbing, regulators, and mass flow controllers); and vacuum deposition/etching system operation, safety, environment, and health issues (covering microwave and RF power supplies and tuners, heating and cooling units, vacuum gauges, valves, and process controllers). Specific materials handling issues include those arising from using deionization water, solvents, cleansers, organic materials, ion implementation sources, diffusion sources, photoiesists, developers, metal dielectrics and toxic, flammable, corrosive and high purity gases as well as packaging materials. Students with a semester level of Freshman 1, Freshman 2 or Sophomore 1 may not enroll.