- Basic Nanofabrication Processes - NMT 312

Catalog description

The course provides an overview of basic processing steps used in all applications of nanofabrication. Both top-down and bottom-up nanofabrication are included. The majority of the course details a step-by-step description of the equipment and processes needed to fabricate devices and structures such as bio- chips, CMOS transistors, power devices, microelectromechanical (MEM) devices, and opto-electronic structures. Students learn the similarities and differences in both the equipment and process flows needed in fabricating all of these various structures.