Plasma Processng

Catalog description

Graduate level Plasma Physics course, the course commences by reviewing basic plasma physics, some atomic processes, and plasma diagnostics. The course ten delves into plasma production using DC glow discharges and RF glow discharges such as magnetron discharges. Broad topics studied in detail are plasma-surface interaction; sputter deposition of thin films; reactive ion etching, ion milling, and texturing; electron beam-assisted chemical vapor deposition; and ion implantation. Further, the topics of sputtering systems, ion sources, electron sources, and ion beam handling will be covered in the course.