Epitaxial Crystal Growth and Thin Film Science

Catalog description

This graduate course focuses on the epitaxial crystal growth and thin film science widely applicable in the electronics and semiconductor industry. This course provides a combination of fundamental and practical knowledge regarding deposition and characterization of metallic and semiconductor thin film materials. Topics include, but are not limited to, thermodynamics of thin film deposition, crystal structures and defects in thin films, the basic nucleation and growth mechanisms of thin films (growth models, lattice matching epitaxy and domain matching epitaxy), thin film processing techniques (physics vapor deposition, chemical vapor deposition, vapor phase epitaxy, molecular beam epitaxy, pulsed laser deposition), thin film growth instrumentation (energy source, chamber configurations, vacuum systems and growth controllers), and several advanced topics related to defect and dislocation control during the growth of thin films for electrical and optical devices.