Fundamentals of MEMS

Catalog description

Microelectromechanical systems (MEMS) are widely used in aerospace, automotive, biotechnology, instrumentation, robotics, manufacturing, and other applications. There is a critical need to synthesize and design high performance MEMS which satisfy the requirements and specifications imposed. Integrated approaches must be applied to design and optimized MEMS, which integrate microelectromechanical motion devices, ICs, and microsensors. This course covers synthesis, design, modeling, simulation, analysis, control and fabrication of MEMS. Synthesis, design and analysis of MEMS will be covered including CAD.