Elements of Nano/Micro-electromechanical Systems Processing and Design

Catalog description

Interdisciplinary fundamentals of nano/microelectromechanical systems (NEMS/ MEMS), including design, fabrication and machining of miniature systems. Draws from mechanics, science and materials. E SC 481 Elements of Nano/Micro-electromechanical Systems Processing and Design (3) The objective of the course is to introduce students to the theory and technology of nanofabrication. This objective is realized via the study of materials and devices for NEMS as well as nano-system's design, manufacture and packaging,. Emphasis on the interrelationships between material properties and processing, device/system structure, and the mechanical, electrical, optical, or (bio)chemical behavior of devices/systems. As taught, the course is multidisciplinary and requires adequate background in materials science, mechanics, and device physics. The course comprises lecture presentations and laboratory demonstrations. Students attending this course come from different engineering majors, physics, and materials science. The students are assessed using a combination of homework assignments, class presentations, group projects, and written quizzes and exams.