Design of Microelectromechanical Systems

Catalog description

A course that covers the design and fabrication of micro- and nano-electromechanical systems. Topics in the course include micro- and nano-fabrication techniques, mechanics of flexures, thin film mechanics, sensing and actuation approaches (e.g., electrostatic, plezoelectric, and piezoresistive), as well as materials and reliability issues. The fundamentals of these topics will be augmented with device-based case studies.