Photonics IV: Semiconductor Synthesis and Devices III

Catalog description

Description: Processing, fabrication and characterization of semiconductor optoelectronic devices in class 100/10000 cleanrooms. Cleanroom operation including general procedure for material processing and device fabrication. Device processing using a variety of processing such as mask aligner, vacuum evaporators and rapid thermal annealer. Testing using optical and electrical testing apparatus such as I-V, C-V Hall, and optical spectral measurement systems. Same course as CHEM 6890 & ECEN 6890 . Previously offered as PHYS 6891. Offered for fixed credit, 1 credit hour, maximum of 4 credit hours.