ECEN 6843

Advanced Microelectronic Fabrication

Oklahoma State University · UGRD · Fall 2026

1 section

Catalog description

Description: Photolithography, wet and dry etching, thermal and electron beam evaporation, photomask design using L-Edit, silicon devices processing, quartz devices processing, silicon-on-sapphire devices processing. GaAs devices processing and MEMS devices processing.

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Class #oklahoma_state-2631Fall 2026UGRD

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Instructor: Staff

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