ECEN 5923

Introduction to MEMS

Oklahoma State University · UGRD · Fall 2026

1 section

Catalog description

Description: Fundamentals of Microsystems. Topics include: energy transduction mechanisms, energy dissipation modeling, energy methods, mechanics of small scale, fabrication process design, micromachining, electronic interface.

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Class #oklahoma_state-2613Fall 2026UGRD

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