ECEN 5843

Microelectronic Fabrication

Oklahoma State University · UGRD · Fall 2026

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Description: Contamination control and clean-room, vacuum systems, wafer manufacturing. Photolithography and alternative lithographic techniques. Physical and chemical vapor deposition, oxidation, etching, doping, packaging, formation of semiconductor devices and circuits. A series of Fabrication lab projects is conducted starting from bare silicon wafers to fabricate Optoelectronic circuits.

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Class #oklahoma_state-2611Fall 2026UGRD
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