ECE 5031

Semiconductor Process Technology

Ohio State University-Marion Campus · UGRD · Fall 2026

1 section

Catalog description

Discrete and integrated circuit device design, silicon VLSI processing technologies, III-V compound semiconductor device fabrication technologies; epitaxy, doping, bandgap engineering; and device measurements and failure mechanisms. Prereq: 3030, or Grad standing in Engineering, Biological Sciences, or Math and Physical Sciences.

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Class #ohio_marion_campus-ECE5031Fall 2026UGRD3 credits

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