Defects, Diffusion and Ion Implantation In Semiconductors

Catalog description

Thermodynamics of vacancies and interstitials, defect complexes, electronic defects, defect annealing processes, self diffusion, dopant and impurity diffusion, substitutional/interstitial diffusion, diffusion in amorphous solids, electro transport, fundamentals of ion-solid interactions, semiconductor doping atomic structure of defects, damage annealing processes, supersaturated alloys, laser annealing, ion beam mixing phenomena, ion implantation and rapid thermal annealing processes, shallow junctions and devices.