Microelectronic Materials Science and Technology

Catalog description

Processes and characterization techniques relevant to microelectronic materials science and technology. Boule growth, water preparation, oxidation, epitaxial growth, doping techniques, metallization, and device applications of elemental and compound semiconductors. Electrical, structural and chemical characterization of semiconductors as well as materials considerations relevant to device fabrication. Credit for both MAT 460 and MSE 560 is not allowed