Microelectronic Materials

Catalog description

Processes and characterization techniques relevant to microelectronic materials science and technology. Boule growth, wafer preparation, oxidation, epitaxial growth, doping techniques, metallization, and device applications of elemental and compound semiconductors. Electrical, structural and chemical characterization of semiconductors is included as well as materials considerations relevant to device fabrication. Credit for both MSE 460 and MSE 560 is not allowed