Micro/Nano Electromechanical Systems

Catalog description

Fundamentals and applications of micro/nano sensors and actuators. Emphasis upon MEMS/NEMS design, microfabrication techniques, and case studies of MEMS devices. Nanomaterials and NEMS devices also covered. Students have opportunity to learn commercial software packages on design and simulation of MEMS and hear from experts from leading MEMS companies through guest lectures. Previous knowledge of MEMS and nanotechnology is not required. The course is restricted to advanced undergrads and graduate students in engineering, materials science, physics and biomedical fields.