MTSC 830

Ion-Solid Interactions.

University of North Carolina at Chapel Hill · UGRD · Fall 2026

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Interatomic potentials, range distribution, radiation damage, annealing, secondary defects, analytical techniques, silicon-based devices, implantation in compound semiconductors, and buried layer synthesis. Ion implantation in metals, ceramics, polymers, and biomaterials.

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Class #north_carolina_chapel_hill-6782Fall 2026UGRD3 credits
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