Microelectromechanical Systems (mems)

Catalog description

This course covers the MEMS field at the graduate level. Tensor physics is reviewed and used to describe physical properties of sensors and actuators, including stress, strain, piezoresistivity, and elasticity. Students will examine the methods that are used to predict deflection of common mechanical structures used in MEMS. The course also covers both bulk and surface micromachining, including techniques for measuring properties of thin films.