Introduction to Sensors and Actuators

Catalog description

Introduction to principles, fabrication techniques, and applications of sensors and actuators. Introduction to the mechanical and electrical properties of materials commonly used in sensors and actuators. The microfabrication processes along with integration of MEMS with CMOS electronics. Fundamental principles and applications of important microsensors, actuation principles on micro-scale. BioMEMS and lab-on-a-chip devices. Prerequisite Course(s): Prerequisite: MENG 221, MENG 310 Classroom Hours - Laboratory and/or Studio Hours – Course Credits: 2-2-3