Micro/nanotechnology Laboratory

Catalog description

The goal of this laboratory course is to provide the students the background to comprehend the existing technology to fabricate microelectromechanical systems (MEMS) and nano-devices and their applications. Students will become familiar with the principles and applications of various generic microfabrication techniques, MEMS, and microfluidics. Students are expected to gain an understanding of the processing techniques, and how they are applied to device fabrication. This course provides students a unique opportunity to test micro/nano-devices, using modern techniques and technology. Prerequisite Course(s): Prerequisites: PHYS 180, PHYS 225, MENG 310 Classroom Hours - Laboratory and/or Studio Hours – Course Credits: 1 - 2 - 1 Inst Cnst