Silicon Integrated Circuit Theory and Fabrication

Catalog description

Semiconductor device fabrication is the process used to create the integrated circuits that are present in most electrical and electronic devices. In this course, steps and processes of fabricating integrated circuit semiconductor devices are covered. Topics include crystal growth (thin film and bulk), thermal oxidation, dopant diffusion/implantation, thin film deposition/etching, and lithography. Introduction to process simulators, such as SUPREM, fabrication and characterization of MOS capacitors, junction diodes and MOSFET devices, introduction to Clean Room, metal interconnects, and statistical process controls. Prerequisite Course(s): Prerequisite: EENG 310 Classroom Hours - Laboratory and/or Studio Hours – Course Credits: 3-0-3