Fundamentals and Applications of MEMS

Catalog description

This course introduces students to the multi-disciplinary and exciting field of Micro-Electro-Mechanical Systems (MEMS) technology. It covers several cases of existing MEMS devices, their applications and limitations. The course also covers fundamentals of micromachining and micro-fabrication techniques that are central to the production of MEMS devices. Furthermore, the course introduces the design and analysis principles of several MEMS devices such as capacitive, piezoelectric, electrostatic sensors and actuators, MEMS-based medical and surgical devices, and biomedical lab-on-a-chip device. The course includes several lectures on the concepts of MEMS design processes, assembly, and packaging. Several types of assignments are included during this course, such as analytical problems, simulation and design assignments, and seminars given by the students. Also, a project that involves design, simulation, and analysis of MEMS devices is a vital component of this course.