Science and Technology of Thin Films. 3 credits, 3 contact hours

Catalog description

Prerequisite: graduate standing. Methods of preparing thin films by physical and chemical means are examined. Topics pertinent to nucleation and growth mechanism of single and polycrystalline films, structure determination, film thickness and compositional evaluation properties are discussed. The electrical, magnetic, optical, and mechanical properties of metallic, semiconductor, and insulating thin films are studied with particular relevance to integrated circuit applications.