ECEN 820

PLASMA PROCESSING OF SEMICONDUCTORS

University of Nebraska at Omaha · UGRD · Fall 2026

1 section

Catalog description

Physics of plasmas and gas discharges developed. Includes basic collisional theory, the Boltzman equation and the concept of electron energy distribution. Results are related to specific gas discharge systems used in semiconductor processing, such as sputtering, etching, and deposition systems. (Cross-listed with ECEN 420 )

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Class #nebraska_omaha-ECEN820Fall 2026UGRD3 credits

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