AREN 8626

MEMS SENSORS DYNAMICS

University of Nebraska at Omaha · UGRD · Fall 2026

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Study of the dynamics of Microelectromechanical system (MEMS) beam-structures. Modeling principles and data analysis from different types of MEMS will be explained along with deep theoretical and experimental investigation of nonlinear MEMS dynamics. Learn to conduct experiments using state-of-the-art MEMS characterization tools. (Cross-listed with AREN 4620 ).

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Class #nebraska_omaha-AREN8626Fall 2026UGRD3 credits
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