EMEC 467
Micro-Electromechanical Systems
Montana State University · UGRD · Fall 2026
1 section
Catalog description
MEMS (microelectromechanical systems) fabrication procedures. MEMS materials and their mechanical properties. Mechanical behavior of microsystems. MEMS packaging and thermal-mechanical stresses in MEMS packages. Reliability issues in MEMS. MEMS case studies using FEM in Comsol in an extended project work
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Availability not recently verifiedClass #montana-EMEC467Fall 2026UGRD3 credits
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