Introduction to MEMS

Catalog description

(cross-leveled with MAE 4680 ). The course will start with a survey of the widespread applications of MEMS sensors and actuators. Micro fabrication methods used in conventional semiconductor industry will be introduced. MEMS-specific processes will be emphasized. Fundamental principles in electric circuits and mechanics will be reviewed. Special attention is on mechanical issues encountered in MEMS design and fabrication. Graded on A-F basis only. Credit Hour s : 3