ECE 8620

Advanced Microelectromechanical Systems

University of Missouri-Columbia · UGRD · Fall 2026

1 section

Catalog description

MEMS development cycle, overview of microfabrication, microsystem modeling, mechanical analysis, thermal analysis, transduction mechanism, case studies; Micromirror, accelerometers, pressure sensors, force sensors, RF MEMS switches, Infrared sensors, and Microsystem packaging. Credit Hour s : 3

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Class #missouri_columbia-1666Fall 2026UGRD

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